SEMICON JAPAN 2026
2026/11/09
Tokyo
Dates
December. 9-11, 2026 3days
Venue
Tokyo Big Sight (Tokyo, Japan)
Booth : East Hall 3, No. E3618
Exhibits
・[New] 300mm FOUP Load Port
・300/200mm Auto Switch Load Port
・200mm SMIF Load Port
・300mm EFEM
・300mm Vacuum Handling Robot
・Tape Frame FOUP Load Port
・Panel FOUP Load Port 310x310mm, 510x515mm
・Panel Aligner
・Panel AMR System
300mm FOUP Load Port
300/200mm Auto Switch Load Port
200mm SMIF Load Port
Panel FOUP Load Port (310x310mm)
Panel FOUP Load Port (510x515mm)
Tape Frame FOUP Load Port
300mm EFEM
Panel AMR System