AMR(Autonomous Mobile Robot) System for Transporting Semiconductor Panels
600mm
Automatic Transportation System
For Back-end Processes /Advanced Back-end Processes
Maximize Efficiency ： Labor-savings through automatic transport and transfer of multi-carrier.
Minimize Transport Time ： Optimize deliveries through intelligent routing and optimal dispatch (Allocation).
Scalable Solution ： Customizable management systems (MES-compatible).
Features Functions
Elevate Your Production Line with Next-Gen. Automation system!
- Versatile Handling : Transports carriers up to panel FOUP, max.100kg/carrier.
- Powerful Management : MCS for large-scale operations (Maximum number of units : 200 units).
- Flexible Setup : Guide-free design for easy implementation and layout changes.
- Omnidirectional traveling capability with lateral and diagonal movements.
- Vibration less than 0.5 G.
- Capable of loading/unloading from both left and right sides.
- Human-Friendly : Coexistence with workers via advanced safety sensors.
- Clean room Ready : ISO Class 5 compliant.
- Self-Sufficient : Automatic charging capability.
- Compliant with safety standard JIS D 6802.
Features
|
Items |
Features |
|---|---|
|
Management system |
Transport, AMR and FOUP management |
|
Objects to be transported |
・600x600mm PANEL FOUP ・510x515mm PANEL FOUP ＊Other sizes can also be supported by replacing the hand attachment. ・ SEMI E 181 |
|
Maximum load capacity |
100kg |
|
Receiving equipment |
Load ports, stockers, lifters |
|
Number of registered sites |
Unlimited |
|
Installation work |
Installation of guides in the building is not required. |
|
Maximum number of units |
200 units |
|
Road surface |
Grating, coated oor |
|
Items |
Features |
|---|---|
|
Cleanliness level |
Class 100(Fed. Std. 209E) |
|
Dimensions |
W860mm×D1,600mm×H1,900mm |
|
Running speeds |
3.6km/h(load) |
|
Positioning accuracy |
±10mm、±5 degrees |
|
Transfer accuracy |
±5mm、±1 degrees |
|
Charging system |
Automatic connector connection system |
|
Safety devices |
Emergency stop, Object / human detection, Destination display, Tape switch, Turn signal, Signal tower, Area sensor, Travel melody |
