Tape Frame FOUP Load Port
380mm Tape Frame
NEW
Yield improvement in post-process
Smart SELOP series
Meets Specifications Required for Semiconductor Manufacturing Equipment, such as Particle-Free and High Durability in Repeated Operation.
- High Reliability, Well Experience
Load Port for 300mm is working in the front-end process in all over the world - Particle Free
(1) Original Door opening technology prevents particle penetration
(2) Low vibration design - SEMI Standard Conformity（E199, E184）
- CID Communication
*option - Adaptor for Open Cassette is Available
*option - Supporting N2 Purge Function
*option - A wide range of products compatible with various Tape Frame FOUPs (Taiwan & Korea, SEMI E199, SEMI E184)
*upon inquiry
Applicable Carrier
- 380mm tape frame 13, 25 slots
