Product line up in wide range that supports semiconductor production miniaturizing with more values
Product line up in wide range that supports semiconductor production miniaturizing with more values

Products

for Front-End Process

300mm FOUP Load Port
(Smart SELOP-8 Series)

Contribution to Further Miniaturization (1xnm)

N2 purge

300mm

Auto Switch LOAD PORT

300mm FOUP and 200mm Open Cassette Both can be used just by remounting!

300mm

200mm

SMIF Load Port

Contribute to high throughput at 200mm process line by automation

200mm

300mm N2 EFEM

Ability to perform cutting edge processes by regulating Ox/H2O levels within the EFEM.

N2 purge

300mm

300mm EFEM

More Professionally, More Efficiently Support Semiconductor Technology

300mm

300mm Sorter

Supporting Highly Efficient and Stable Wafer Sorting

300mm

Automated Wafer Transportation System for LED/Power Semiconductor

Applicable for increasing size of LED/Power Semiconductor Wafer

LED

Power Semiconductor

for Back-End Process

Tape Frame FOUP Load Port

Yield improvement in post-process

380mm Tape Frame

NEW

Tape Frame Wafer EFEM

EFEM Solution for 3-D Stacking Device Process (Semiconductor Manufacturing Process using Tape Frame)

380mm Tape Frame

Information