SEMICON JAPAN
2025/11/20
Tokyo
Dates
December. 17-19, 2025 3days
Venue
Tokyo Big Sight (Tokyo, Japan)
Booth : East Hall No. E4732
Exhibits
・Panel FOUP Load Port
・Panel AMR System (Reference Exhibit)
・Tape Frame FOUP Load Port（SEMI E63, E184, Taiwan and Korea Model）
・Tape Frame Aligner
・300mm EFEM
・N2 Purge 300mm FOUP Load Port
・300/200mm Auto Switch Load Port
・200mm SMIF Load Port
・300mm Vacuum Robot
Panel FOUP Load Port
Tape Frame FOUP Load Port
300mm EFEM
200mm SMIF Load Port